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Semiconductor Wet Etching

Semiconductor Wet Etching：Spin coater、Cleaning System

1 Deionized Water(DIW)Heater Systems

Deionized water (DIW) heating system, all surfaces in

contact with the liquid are ultra-pure PVDF/PFA materials Through PLC temperature precise control technology,

it provides stable and accurate temperature output

power range from 40KW to 225KW.

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Heat Sink

It can obtain heat energy from neighboring heat sources and diffuse it, so as to reduce the temperature of neighboring components and ensure their life.

Pipe/Tube Heating

Oplimized the waft density to compensate the geometry dependent heat loss to improve the femperothure uniformity dlong gas line with different types of components.

Semiconductor Dry Etching

Semiconductor Dry Etching ：PVD, CVD, PECVD, ALD

Semiconductor Wet Etching

Deionized water (DIW) heating system

Ceramic Heating

High-temperature sintered, can be customized according to customer needs size power style material

Control System

CMS(Center Monitoring System),is a software, which enable the customer to monitor the heaters inside an entire lab.

Semiconductor Wet Etching

Quartz online heater is a heating device that uses quartz material as a heating element.