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Semiconductor Dry Etching

Semiconductor Dry Etching ：PVD, CVD, PECVD, ALD

1 Exhaust Heating Solutions

2 PVD/CVD Gas Delivery Heating Solutions



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Heat Sink

It can obtain heat energy from neighboring heat sources and diffuse it, so as to reduce the temperature of neighboring components and ensure their life.

Semiconductor Dry Etching

Semiconductor Dry Etching ：PVD, CVD, PECVD, ALD

Pipe/Tube Heating

Oplimized the waft density to compensate the geometry dependent heat loss to improve the femperothure uniformity dlong gas line with different types of components.

Semiconductor Wet Etching

Deionized water (DIW) heating system

Ceramic Heating

High-temperature sintered, can be customized according to customer needs size power style material

Control System

CMS(Center Monitoring System),is a software, which enable the customer to monitor the heaters inside an entire lab.

Semiconductor Wet Etching

Quartz online heater is a heating device that uses quartz material as a heating element.